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Standard [CURRENT]

ISO 23216:2021-05

Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

German title
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektroskopischer Ellipsometrie
Publication date
2021-05
Original language
English
Pages
7

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Publication date
2021-05
Original language
English
Pages
7

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Content
ICS
25.220.99

Cooperation at DIN

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