Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps
German title
Vakuumtechnik - Standardverfahren zur Messung der Leistungsdaten von Vakuumpumpen - Teil 4: Turbomolekularvakuumpumpen
Publication date
2018-07
Original language
English
Pages
10
Publication date
2018-07
Original language
English
Pages
10
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Content
ICS
23.160
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