Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
German title
Chemische Analytik an Oberflächen - Sekundärionenmassenspektrometrie - Methode für die Bestimmung von Parametern der Tiefenauflösung mit Hilfe von Referenzmaterialien mit mehreren Deltaschichten
Publication date
2003-07
Original language
English
Pages
5
Publication date
2003-07
Original language
English
Pages
5
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Content
ICS
71.040.50
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