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Standard [CURRENT]

ISO 16413:2020-08

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

German title
Bestimmung der Dicke, Dichte und Grenzflächenbreite von Dünnschichten durch Röntgenreflektometrie - Geräteanforderungen, Einstellung und Positionierung, Datensammlung, Datenanalyse und Berichterstattung
Publication date
2020-08
Original language
English
Pages
32

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Publication date
2020-08
Original language
English
Pages
32

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Content
ICS
35.240.70, 71.040.40
Replacement amendments

This document replaces ISO 16413:2013-02 .

Cooperation at DIN

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