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Standard [CURRENT]

ISO 14237:2010-07

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

German title
Chemische Oberflächenanalyse - Sekundärionenmassenspektrometrie - Bestimmung der Atomkonzentration von Bor in Silizium unter Verwendung gleichmäßig dotierter Materialien
Publication date
2010-07
Original language
English
Pages
19

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Publication date
2010-07
Original language
English
Pages
19

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Content
ICS
71.040.50
Replacement amendments

This document replaces ISO 14237:2000-02 .

Cooperation at DIN

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