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Standard [CURRENT]

ISO 13083:2015-08

Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

German title
Chemische Oberflächenanalyse - Rastersondenmikroskopie - Standards zur Definition und Kalibrierung der räumlichen Auflösung von Rasterausbreitungswiderstandsmikroskopie und Rasterkapazitätsmikroskopie
Publication date
2015-08
Original language
English
Pages
14

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Publication date
2015-08
Original language
English
Pages
14

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Content
ICS
71.040.40

Cooperation at DIN

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