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Standard [CURRENT]

ISO 11952:2019-05

Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

German title
Chemische Oberflächenanalyse - Rastersondenmikroskopie - Bestimmung geometrischer Kenngrößen mit Rastersondenmikroskopie: Kalibrierung von Messsystemen
Publication date
2019-05
Original language
English
Pages
58

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Publication date
2019-05
Original language
English
Pages
58

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Content
ICS
71.040.40
Replacement amendments

This document replaces ISO 11952:2014-05 .

Cooperation at DIN

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