Standard
[CURRENT]
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IEC 62047-2:2006-08
Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
- German title
- Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen
- Publication date
-
2006-08
- Original language
-
English,
French
- Pages
- 25
- Publication date
-
2006-08
- Original language
-
English,
French
- Pages
- 25
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