Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films (IEC 62374:2007); German version EN 62374:2007
German title
Halbleiterbauelemente - Prüfung des zeitabhängigen dielektrischen Durchbruchs (TDDB) für dielektrische Gate-Schichten (IEC 62374:2007); Deutsche Fassung EN 62374:2007
Publication date
2008-02
Original language
German
Pages
24
Publication date
2008-02
Original language
German
Pages
24
DOI
https://dx.doi.org/10.31030/1400183
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ICS
31.080.01
DOI
https://dx.doi.org/10.31030/1400183
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