Standard
[CURRENT]
BS EN 62047-6:2010-04-30
Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials
- German title
- Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht-Werkstoffen
- Publication date
-
2010-04-30
- Original language
-
English
- Pages
- 20
- Publication date
-
2010-04-30
- Original language
-
English
- Pages
- 20
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