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Standards Worldwide
Standards Worldwide
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Standard [CURRENT]

BS EN 62047-26:2016-05-31

Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures

German title
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen
Publication date
2016-05-31
Original language
English
Pages
34

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Publication date
2016-05-31
Original language
English
Pages
34

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