Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
German title
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prüfverfahren für lineare thermische Ausdehnungskoeffizienten für freistehende Werkstoffe der Mikrosystemtechnik
Publication date
2013-10-31
Original language
English
Pages
24
Publication date
2013-10-31
Original language
English
Pages
24
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