Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
German title
Eichung der Vergrößerung von REM (Rasterelektronenmikroskopen) unter Verwendung der Eichprobe NBS-SRM-484
Publication date
2014
reapproved: 2019
Original language
English
Pages
6
Publication date
2014
reapproved: 2019
Original language
English
Pages
6
DOI
https://dx.doi.org/10.1520/E0766-14R19
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Short description
1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The relationship between true magnification and indicated magnification is a complicated function of operating conditions. 2 Therefore, this practice must be applied to each set of standard operating conditions to be used. 1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.