Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films
Publication date
2011
reapproved: 2018
Original language
English
Pages
2
Publication date
2011
reapproved: 2018
Original language
English
Pages
2
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Short description
1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section , which were generated by Committee E08 on Fatigue and Fracture. Terminology E 1823 Relating to Fatigue and Fracture Testing is applicable to this standard. 1.2 The terms are listed in alphabetical order.